High-k Materials in Multi-Gate FET Devices (Science, Technology, and Management)

High-k Materials in Multi-Gate FET Devices focuses on high-k materials for advanced FET devices. It discusses emerging challenges in the engineering and applications and considers issues with associated technologies. It covers the various way of utilizing high-k dielectrics in multi-gate FETs for enhancing their performance at the device as well as circuit level.
Provides basic knowledge about FET devices
Presents the motivation behind multi-gate FETs, including current and future trends in transistor technologies
Discusses fabrication and characterization of high-k materials
Contains a comprehensive analysis of the impact of high-k dielectrics utilized in the gate-oxide and the gate-sidewall spacers on the GIDL of emerging multi-gate FET architectures
Offers detailed application of high-k materials for advanced FET devices
Considers future research directions
This book is of value to researchers in materials science, electronics engineering, semiconductor device modeling, IT, and related disciplines studying nanodevices such as FinFET and Tunnel FET and device-circuit codesign issues.