Defects in Optoelectronic Materials

Defects in Optoelectronic Materials

Author
Kazumi Wada, Stella W. Pang
Publisher
CRC Press
Language
English
Year
2022
Page
425
ISBN
9789056997144
File Type
pdf
File Size
17.5 MiB

Defects in Optoelectronic Materials bridges the gap between device process engineers and defect physicists by describing current problems in device processing and current understanding of these defects based on defect physics. The volume covers defects and their behaviors in epitaxial growth, in various processes such as plasma processing, deposition and implantation, and in device degradation. This book also provides graduate students cutting-edge information on devices and materials interaction.

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