Fabrication of Micro/Nano Structures via Precision Machining: Modelling, Processing and Evaluation
- Author
- Guoqing Zhang, Bin Xu, Yanjun Lu, Suet To
- Publisher
- Springer
- Language
- English
- Year
- 2023
- Page
- 396
- ISBN
- 9819913373,9789819913374
- File Type
- pdf
- File Size
- 20.1 MiB
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