Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
- Author
- Jean Laconte, Denis Flandre, Jean-Pierre Raskin
- Publisher
- Springer
- Language
- English
- Edition
- 1st Edition.
- Year
- 2010
- Page
- 291
- ISBN
- 9781441939579,1441939571
- File Type
- pdf
- File Size
- 6.2 MiB
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