Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS (v. 1)
- Author
- Cornelius T. Leondes
- Publisher
- Springer
- Language
- English
- Year
- 2006
- Page
- 2000
- ISBN
- 0-387-24520-0,0-387-25786-1,9780387245202,9780387257862-2
- File Type
- pdf
- File Size
- 44.3 MiB
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