Thin film materials technology: sputtering of compound materials
- Author
- Kiyotaka Wasa, Makoto Haber, Hideaki Adachi
- Publisher
- William Andrew Pub.; Springer
- Language
- English
- Year
- 2004
- Page
- 537
- ISBN
- 9780815514831,0-8155-1483-2,3-540-21118-7
- File Type
- pdf
- File Size
- 8.1 MiB
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