Pvd for Microelectronics Sputter Deposition Applied to Semiconductor Manufacturing
- Author
- Ronald A. Powell, Stephen Rossnagel
- Publisher
- Academic Press
- Language
- English
- Edition
- 1st
- Year
- 1999
- Page
- 435
- ISBN
- 012533026X,9780125330268,9780080542928
- File Type
- pdf
- File Size
- 22.9 MiB
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