Nano- and Micro-Electromechanical Systems - Fundamentals of Nano- and Microengineering
- Author
- edited by Charles L. Wilson
- Publisher
- CRC
- Language
- English
- Year
- 2007
- Page
- 344
- ISBN
- 0-8493-916-6
- File Type
- pdf
- File Size
- 8.4 MiB
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