Nanolithography and Patterning Techniques in Microelectronics
- Author
- David G. Bucknall
- Publisher
- Woodhead Pub.; CRC Press
- Language
- English
- Edition
- 1
- Year
- 2005
- Page
- 410
- ISBN
- 9780849334474,0-8493-3447-0,1855739313,1845690907,9781855739314
- File Type
- pdf
- File Size
- 7.7 MiB
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