Microsensors, MEMS, and smart devices
- Author
- Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
- Publisher
- J. Wiley
- Language
- English
- Edition
- 1
- Year
- 2001
- Page
- 521
- ISBN
- 9780471861096,0-471-86109X
- File Type
- pdf
- File Size
- 39.7 MiB
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