Mechanics of Microelectromechanical Systems
- Author
- Nicolae Lobontiu, Ephrahim Garcia
- Publisher
- Springer
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 418
- ISBN
- 9781402080135,1402080131
- File Type
- pdf
- File Size
- 11.9 MiB
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