Dielectric films for advanced microelectronics
- Author
- Mikhail Baklanov, Karen Maex, Martin Green
- Publisher
- John Wiley & Sons
- Language
- English
- Year
- 2007
- Page
- 510
- ISBN
- 9780470013601,0470013605
- File Type
- pdf
- File Size
- 10.2 MiB
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