Handbook of Thin-Film Deposition Processes and Techniques: Principles, Methods, Equipment and Applications
- Author
- Krishna Seshan
- Publisher
- William Andrew
- Language
- English
- Edition
- 2
- Year
- 2002
- Page
- 646
- ISBN
- 9780815514428,0-8155-1442-5,0-8155-1442-5
- File Type
- pdf
- File Size
- 6.0 MiB
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