Electroceramic-based MEMS: fabrication-technology and applications
- Author
- Nava Setter
- Publisher
- Springer
- Language
- English
- Edition
- 1
- Year
- 2005
- Page
- 415
- ISBN
- 0387233105,9780387233109
- File Type
- pdf
- File Size
- 8.2 MiB
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