Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices
- Author
- Ungyu Paik, Jea-Gun Park
- Publisher
- CRC Press
- Language
- English
- Year
- 2009
- Page
- 196
- ISBN
- 1420059114,9781420059113
- File Type
- pdf
- File Size
- 10.7 MiB
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