Chemical Mechanical Planarization of Microelectronic Materials
- Author
- Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
- Publisher
- Wiley-VCH
- Language
- English
- Edition
- First Edition
- Year
- 1997
- Page
- 337
- ISBN
- 0471138274,9780471138273
- File Type
- djvu
- File Size
- 3.3 MiB
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