Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering
- Author
- Sergey Edward Lyshevski
- Publisher
- CRC Press
- Language
- English
- Year
- 2000
- Page
- 352
- ISBN
- 0849309166,9780849309168
- File Type
- pdf
- File Size
- 8.0 MiB
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