Advanced Metallization for Future Ulsi: Symposium Held April 8-11, 1996, San Francisco, California, U.S.A.
- Author
- K. N. Tu, James W. Mayer, J. M. Poate, Lih J. Chen
- Publisher
- Materials Research Society
- Language
- English
- Year
- 1996
- Page
- 587
- ISBN
- 1558993304,9781558993303
- File Type
- djvu
- File Size
- 7.2 MiB
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