Piezoelectric Multilayer Beam-Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration (Microtechnology and MEMS)
- Author
- Rudiger Ballas
- Language
- English
- Edition
- 1
- Year
- 2007
- Page
- 367
- ISBN
- 3540326413,9783540326427,9783540326410
- File Type
- pdf
- File Size
- 3.1 MiB
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