MEMS: A Practical Guide to Design, Analysis, and Applications
- Author
- Jan Korvink, Oliver Haber
- Language
- English
- Year
- 2005
- Page
- 990
- ISBN
- 0815514972,9780815514978,3540211179,9783540211174,9780815518259
- File Type
- pdf
- File Size
- 20.0 MiB
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