Database Needs for Modeling and Simulation of Plasma Processing (Compass Series)
- Author
- Panel on Database Needs in Plasma Processing, National Research Council
- Publisher
- National Academies Press
- Language
- English
- Year
- 1996
- Page
- 74
- ISBN
- 0309055911,9780309055918,0585084548,9780585084541
- File Type
- pdf
- File Size
- 489.5 KiB
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