Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)
- Author
- Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
- Publisher
- William Andrew
- Language
- English
- Year
- 2010
- Page
- 636
- ISBN
- 9780815515944
- File Type
- pdf
- File Size
- 16.8 MiB
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