Rare-Earth Implanted MOS Devices for Silicon Photonics: Microstructural, Electrical and Optoelectronic Properties
- Author
- Lars Rebohle, Wolfgang Skorupa (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2010
- Page
- 174
- ISBN
- 3642144462,9783642144462
- File Type
- pdf
- File Size
- 2.8 MiB
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