Fabrication of Silicon Microprobes for Optical Near-Field Applications
- Author
- Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi
- Language
- English
- Edition
- 1
- Year
- 2002
- Page
- 192
- ISBN
- 0849311543,9780849311543,9781420040708
- File Type
- pdf
- File Size
- 4.6 MiB
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