Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)
- Author
- Kiyotaka Wasa, Shigeru Haber
- Language
- English
- Year
- 1993
- Page
- 316
- ISBN
- 0815512805,9780815512806,9780815517733
- File Type
- pdf
- File Size
- 10.2 MiB
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