Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly
- Author
- Ostrikov K., Xu Sh.
- Publisher
- Wiley-VCH
- Language
- English
- Year
- 2007
- Page
- 316
- ISBN
- 3527294430,3527298363,3527298371,3527305076
- File Type
- pdf
- File Size
- 7.6 MiB
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