Enabling Technologies for MEMS and Nanodevices (Advanced Micro and Nanosystems)
- Author
- Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 439
- ISBN
- 352730746X,9783527307463,9783527616923
- File Type
- pdf
- File Size
- 8.4 MiB
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