Plasma Processing of Materials: Scientific Opportunities and Technological Challenges
- Author
- Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astonomy, National Research Council
- Publisher
- National Academy
- Language
- English
- Year
- 1991
- ISBN
- 0309045975,9780309045971
- File Type
- chm
- File Size
- 602.9 KiB
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