MEMS Materials and Processes Handbook
- Author
- Tina L. Lamers, Beth L. Pruitt (auth.), Reza Ghodssi, Pinyen Lin (eds.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2011
- Page
- 1188
- ISBN
- 0387473165,9780387473161
- File Type
- pdf
- File Size
- 27.0 MiB
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