Design and Manufacturing of Active Microsystems
- Author
- S. Büttgenbach, A. Burisch (auth.), Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2011
- Page
- 444
- ISBN
- 3642129021,9783642129025
- File Type
- pdf
- File Size
- 52.2 MiB
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