Reactive Sputter Deposition (Springer Series in Materials Science)
- Author
- Diederik Depla
- Publisher
- Springer
- Language
- English
- Edition
- 1
- Year
- 2008
- Page
- 589
- ISBN
- 3540766626,9783540766629
- File Type
- pdf
- File Size
- 17.8 MiB
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