CMOS-MEMS: Advanced Micro and Nanosystems
- Author
- Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
- Publisher
- Wiley-VCH
- Language
- English
- Edition
- 1
- Year
- 2005
- Page
- 603
- ISBN
- 3527310800,9783527310807,9783527616930
- File Type
- pdf
- File Size
- 6.6 MiB
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