Shape and functional elements of the bulk silicon microtechnique: a manual of wet-etched silicon structures
- Author
- Joachim Frühauf
- Publisher
- Springer
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 228
- ISBN
- 3540221093,9783540221098
- File Type
- pdf
- File Size
- 9.2 MiB
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