MEMS and NEMS: Systems, Devices, and Structures (Nano- and Microscience, Engineering, Technology, and Medicine)
- Author
- Sergey Edward Lyshevski
- Publisher
- CRC Press
- Language
- English
- Edition
- 1
- Year
- 2002
- Page
- 474
- ISBN
- 0849312620,9780849312625
- File Type
- pdf
- File Size
- 4.0 MiB
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