Silicon carbide microelectromechanical systems for harsh environments
- Author
- Rebecca Cheung
- Publisher
- Imperial College Press; Distributed by World Scientific Pub
- Language
- English
- Edition
- illustrated edition
- Year
- 2006
- Page
- 193
- ISBN
- 1860946240,9781860946240
- File Type
- pdf
- File Size
- 8.7 MiB
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