Low pressure plasmas and microstructuring technology
- Author
- Gerhard Franz (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2009
- Page
- 732
- ISBN
- 9783540858485,3540858482,9783540858492
- File Type
- pdf
- File Size
- 14.5 MiB
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