Towards synthesis of micro-/nano-systems: the 11th International Conference on Precision Engineering (ICPE) August 16-18, 2006, Tokyo, Japan
- Author
- European Society for Precision Engineeri
- Publisher
- Springer
- Language
- English
- Year
- 2007
- Page
- 345
- ISBN
- 9781846285592,1846285593
- File Type
- pdf
- File Size
- 18.1 MiB
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