Pulsed and Pulsed Bias Sputtering: Principles and Applications
- Author
- Edward V. Barnat, Toh-Ming Lu (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2003
- Page
- 157
- ISBN
- 978-1-4020-7543-8,978-1-4615-0411-5
- File Type
- pdf
- File Size
- 5.0 MiB
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