Si Silicon: Silicon Nitride in Microelectronics and Solar Cells
- Author
- Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer (auth.), Alfred Pebler, Friedrich Schröder (eds.)
- Publisher
- Springer Berlin Heidelberg
- Language
- English
- Year
- 1991
- Page
- 417
- ISBN
- 978-3-662-09903-2,978-3-662-09901-8
- File Type
- pdf
- File Size
- 9.6 MiB
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