Advanced Materials and Technologies for Micro Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics)
- Author
- Evgeni Gusev, Eric Garfunkel, Arthur Dideikin
- Publisher
- Springer
- Language
- English
- Edition
- 1st Edition.
- Year
- 2010
- Page
- 310
- ISBN
- 9048138051,9789048138050
- File Type
- pdf
- File Size
- 36.6 MiB
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