Advanced Metallization and Interconnect Systems for Ulsi Applications in 1997
- Author
- R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi
- Publisher
- Materials Research Society
- Language
- English
- Year
- 1999
- Page
- 697
- ISBN
- 1558994122,9781558994126
- File Type
- djvu
- File Size
- 8.6 MiB
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