Chemical Mechanical Polishing /Fundamentals and Challenges: Symposium Held April 5-7, 1999, San Francisco, California, U.S.A
- Author
- S. V. Babu, S. Danyluk, M. I. Krishnan, M. Tsujimura
- Publisher
- Materials Research Society
- Language
- English
- Year
- 2000
- Page
- 279
- ISBN
- 1558994734,9781558994737
- File Type
- djvu
- File Size
- 3.1 MiB
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