Smart sensors and MEMS: [proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003]
- Author
- Maria Teresa S.R. Gomes, Sergey Y. Yurish, Maria T.S.R. Gomes
- Publisher
- Kluwer Academic
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 489
- ISBN
- 1402029284,9781402029288,1402029276,9781402029271
- File Type
- pdf
- File Size
- 20.7 MiB
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