Sputtering by Particle Bombardment I: Physics and Applications
- Author
- R. Behrisch
- Publisher
- Springer-Verlag
- Language
- English
- Year
- 1981
- Page
- 289
- ISBN
- 9780387105215,0-387-10521-2
- File Type
- pdf
- File Size
- 14.5 MiB
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