Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
- Author
- Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo
- Publisher
- William Andrew
- Language
- English
- Edition
- 1
- Year
- 1991
- Page
- 546
- ISBN
- 0815512201,9780815512202
- File Type
- pdf
- File Size
- 26.7 MiB
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