Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
- Author
- Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber
- Publisher
- Noyes Publications
- Language
- English
- Year
- 1990
- Page
- 535
- ISBN
- 0815512201,9780815512202,9780815517634
- File Type
- djvu
- File Size
- 5.0 MiB
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