Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range
- Author
- G?nter Wilkening, Ludger Koenders
- Publisher
- Wiley-VCH
- Language
- English
- Year
- 2005
- Page
- 527
- ISBN
- 352740502X,9783527405022
- File Type
- pdf
- File Size
- 10.7 MiB
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