Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
- Author
- Badih El-Kareh (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2009
- Page
- 598
- ISBN
- 0387367985,9780387367989,9780387690100
- File Type
- pdf
- File Size
- 14.7 MiB
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