Integrated Chemical Microsensor Systems in CMOS Technology (Microtechnology and MEMS)
- Author
- Andreas Hierlemann
- Publisher
- Springer
- Language
- English
- Edition
- 1
- Year
- 2005
- Page
- 236
- ISBN
- 3540237828,9783540237822
- File Type
- pdf
- File Size
- 3.6 MiB
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