Handbook of chemical vapor depostion [i.e. deposition] (CVD) : principles, technology, and applications
- Author
- Hugh O Pierson
- Publisher
- Noyes Publications/William Andrew Pub
- Language
- English
- Edition
- 2nd ed
- Year
- 1999
- Page
- 505
- ISBN
- 9780815514329,0815514328
- File Type
- pdf
- File Size
- 3.5 MiB
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